Method of interconnecting electronic components using a plurality of conductive studs

ABSTRACT

A method of interconnecting electronic components by using a plurality of conductive studs on a surface of a first electronic component and a plurality of corresponding conductive vias on the surface of a second electronic component. Camber on the surface of electronic components may be overcome by coating the surface with a dielectric, planarizing the dielectric, and forming conductive vias corresponding to the contact pads thereon. The conductive studs are substantially lead-free and preferably comprise of copper.

CROSS-REFERENCE TO RELATED APPLICATIONS

Aspects of the present invention are related to subject matter disclosedin co-pending applications entitled “Z-Axis Compressible Polymer WithFine Metal Matrix Suspension,” Ser. No. 09/315,373 filed on even dateherewith and assigned to the assignee of the present invention, thesubject matter of which is hereby incorporated by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

This invention relates to electronic components which utilize asubstantially lead-free interconnect process when forming an electronicmodule.

2. Description of Related Art

As the circuit density increases on integrated circuit devices such assilicon microprocessors, there is a need for high densityinterconnection between such a device and a chip carrier to which thesedevices are typically attached. Traditional methods of joining usingsolder ball arrays may become difficult with such dense circuitry.

Typically, solder ball arrays require fluxes when joining lead basedsolders. With connection densities reaching about 150 μm or below, itbecomes difficult to clean such fluxes. Without effective flux cleaning,underfill materials which are used to enhance reliability of theresulting electronic module run the risk of delaminating. The use oflead based solder also increases the difficulties in disposing of anywaste.

The circuit density also poses problems with shorting between adjacentsolder balls particularly on chip carriers having camber or deformities.Typical chip carriers such as a ceramic substrate exhibit about 25 toabout 50 μm camber as measured from a flat surface of the substrate.When a device with solder balls is joined to such a carrier, some of thesolder balls contact the mating pads. Due to the wetting action of thesolder the device is pulled down and remaining solder balls which makecontact further pull down the chip. As a result, after joining, many ofthe solder balls are in closer proximity to each other and may becontacting each other leading to shorts.

Bearing in mind the problems and deficiencies of the prior art, it istherefore an object of the present invention to provide a method ofinterconnecting high circuit density electronic components utilizingsubstantially lead-free interconnects which do not require flux andtakes into account the deformities on a substrate surface.

It is another object of the present invention to provide an electronicmodule having high circuit density electronic components which utilizessubstantially lead-free interconnects which do not require flux andtakes into account the deformities on a substrate surface.

Still other objects and advantages of the invention will in part beobvious and will in part be apparent from the specification.

SUMMARY OF THE INVENTION

The above and other objects and advantages, which will be apparent toone of skill in the art, are achieved in the present invention which isdirected to, in a first aspect, a method of interconnecting electroniccomponents comprising the steps of: (a) providing a first electroniccomponent having electrical devices with corresponding bonding pads, thefirst electronic component having a patterned dielectric film formedthereon, the dielectric film having a plurality of protruding conductivestuds, the studs corresponding to the bonding pads and adapted forelectrical connection to the electrical devices; (b) providing a secondelectronic component having a dielectric film formed thereon, thedielectric film adapted to offset camber on a surface of the secondelectronic component having a plurality of conductive vias correspondingto the studs on the first electronic component; (c) providing aninterposer having electrical interconnections corresponding to the studsand vias; and (d) aligning and contacting the first electronic componentand the second electronic component with the interposer disposedtherebetween, such that the studs of the first electronic component andthe vias of the second electronic component are adapted to beelectrically and mechanically interconnected by the interposer.

Preferably, step (a) comprises providing a semiconductor chip havingelectrical devices with corresponding bonding pads, the chip having apatterned and cured polyimide film formed thereon, the polyimide filmhaving a plurality of protruding conductive metal studs, the studscorresponding to the bonding pads and adapted for electrical connectionto the electrical devices.

Preferably, in step (a) the studs protruding about 15 μm to about 20 μmfrom a surface of the dielectric film and having of about 50 to about 75μm and may comprise copper.

Preferably, step (b) comprises providing a substrate having a curedpolyimide film formed thereon, the polyimide film having a plurality ofcopper vias substantially planar to a surface of the film and cappedwith gold, the vias corresponding to the studs on the first electroniccomponent. Preferably, in step (b) the vias have a height of at leastabout 15 to about 30 μm and may protrude about 10 to about 15 μm from asurface of the dielectric film.

Preferably, step (b) comprises providing a substrate having a dielectricfilm formed thereon, the dielectric film adapted to offset camber on asurface of the substrate having a plurality of protruding conductivemetal vias corresponding to the studs on the first electronic component.

Preferably, step (c) comprises providing a flexible interposer havingelectrical interconnections comprising conductive metal vias withpalladium dendrites formed on a top exposed surface and a bottom exposedsurface.

The present invention is directed to, in another aspect, an electronicmodule comprising a first electronic component having electrical deviceswith corresponding bonding pads, the first electronic component having afirst dielectric film formed thereon, the film having a plurality ofconductive studs corresponding to the bonding pads and adapted forelectrical connection to the electrical devices; a second electroniccomponent having a second dielectric film formed thereon, the filmhaving a plurality of conductive vias corresponding to the studs on thefirst electronic component; an interposer disposed between the first andsecond electronic components having a plurality of interconnectionscorresponding to the studs of the first electronic component and thevias of the second electronic components. Preferably, the plurality ofconductive studs protrude about 15 to about 20 μm from a surface of thefirst dielectric film with a diameter of about 50 to about 75 μm.

BRIEF DESCRIPTION OF THE DRAWINGS

The features of the invention believed to be novel and the elementscharacteristic of the invention are set forth with particularity in theappended claims. The figures are for illustration purposes only and arenot drawn to scale. The invention itself, however, both as toorganization and method of operation, may best be understood byreference to the detailed description which follows taken in conjunctionwith the accompanying drawings in which:

FIG. 1 is a cross-sectional view of a silicon wafer having thesubstantially lead-free protruding conductive studs of the presentinvention.

FIG. 2 is a cross-sectional view of a singulated chip or die made inaccordance with a method of the present invention.

FIG. 3 is a cross-sectional view of a deformed chip carrier planarizedin accordance with a method of the present invention.

FIG. 4 is a cross-sectional view of a chip, a chip carrier and aninterposer when practicing a method of the present invention.

FIG. 5 is a cross-sectional view of an interposer utilized in thepresent invention.

DESCRIPTION OF THE PREFERRED EMBODIMENT(S)

In describing the preferred embodiment of the present invention,reference will be made herein to FIGS. 1-5 of the drawings in which likenumerals refer to like features of the invention. Features of theinvention are not necessarily shown to scale in the drawings.

The present invention discloses a novel interconnect methodology using asubstantially lead-free stud that provides an essentially planar surfacefor chip to substrate interconnection. The present invention reduces thedifficulties encountered when joining a chip to a substrate havingdeformities on the substrate surface which cause the traditional solderinterconnects to flow away from a solder pad that it is not in contactwith. Additionally, the use of an interconnect technology which does notutilize lead based solder is of significant environmental benefit.

In preparing a chip and substrate for interconnection in accordance withthe present invention, an array of protruding lead-free metal studs areformed on the silicon device as shown in FIG. 1. A silicon wafer 10 isprovided with, preferably, a number of electrical devices formed thereonencompassed in wiring layer 20. After the last wiring level is finishedon wafer 10, a blanket layer of a dielectric material 30 is preferablyapplied to the surface of wafer 10.

Dielectric material 30 is preferably a photosensitive material, mostpreferably polyimide, and is adapted to have a thickness ofapproximately 40 to 50 μm after full curing. Depending upon thedielectric chosen, the curing conditions would be known to one ofordinary skill in the art. Dielectric 30 is patterned with a standardphoto expose, develop and cure process. The pattern exposed on thedielectric would correspond to bonding pads electrically connected tothe electrical devices formed on wafer 10.

A blanket layer of a conductive material, preferably a metal, isdeposited over wafer 10 to fill the pattern of holes in dielectric 30.Where the conductive material is a metal, to enhance adhesion of themetal, a first metal may be preferably sputter deposited into thepattern holes of dielectric 30, followed by the sputter deposition of asecond metal which has better conductivity. Preferably, the metal ischromium/copper such that chromium may be sputter deposited first toprovide better adhesion of the copper. Upon substantially filling thepattern holes of dielectric 30, planarization techniques are used toplanarize the studs 40 with the dielectric 30. Typical planarizationtechniques may be chemical mechanical polishing.

At this stage, it is preferred to plasma etch the dielectric 30 suchthat studs 40 protrude about 15 μm to about 20 μm from a surface of thedielectric 30. The plasma etching may be carried out in an oxygenatmosphere under conditions which allow for controllable etching of thedielectric 30. Most preferably, the studs 40 have a diameter of about 50μm to about 70 μm. Studs 40, now exposed and protruding from a surfaceof dielectric 30, may be coated with about 500 to about 1000Å of gold,preferably by electroless plating. The wafer is then subjected to adiffusion step preferably in an inert atmosphere at about 200 to about300° C. Wafer 10 is then singulated to produce the individual chip ordie 12 as shown in FIG. 2 for connection to a chip carrier.

FIG. 3 shows a typical chip carrier 15 having a slight deformity asshown by camber C. Typical chip carriers such as a ceramic substratetypically exhibit about 25 μm to about 50 μm of camber. Chip carrier 15is planarized by utilizing a process where a dielectric layer 50 isapplied and cured on chip carrier 15 such that a thickness of camber anddielectric 50 of about 60 to about 90 μm, preferably about 75 μm, isachieved. Preferably, dielectric 50 comprises polyimide.

Dielectric 50 is planarized using chemical mechanical polishing or othertechniques to produce a flat surface with a maximum thickness on thecamber of about 40 μm. An array of vias 60 are created preferably bylaser ablation which correspond to the studs 40 for interconnection tothe corresponding electrical devices on wafer 10. Preferably, the vias60 are substantially filled with a conductive material such as a metal.Where vias 60 comprise metal, to enhance adhesion a blanket layer of afirst metal is sputter deposited followed by sputter deposition of asecond more conductive metal.

Dielectric 50 is again planarized to create a level array of vias 60. Ifdesired, the exposed conductive surfaces may be capped with gold platingand followed by diffusion. In another embodiment shown in FIG. 3A, vias60A may protrude about 10 μm to about 15 μm from the surface ofdielectric 50 by etching back a portion of dielectric 50. Preferably,vias 60 comprise chromium/copper having a minimum height on chip carrier15 of between about 15 μm to about 30 μm where the chip carrier haslittle deformity and a maximum via height of about 30 μm to about 60 μmwhere chip carrier 15 has a high degree of deformity, or camber.

FIG. 4 illustrates a method of interconnecting a chip to a substrate inaccordance with a method of the present invention. Chip 12 is shown asbeing aligned over chip carrier 15 such that protruding studs 40Acorrespond to vias 60. An interposer 100 is aligned and disposed betweenchip 12 and chip carrier 15. To connect the array of studs 40A with vias60, heat and pressure are usually applied after interposer 100, chip 12and chip carrier 15 are contacted together. A preferred interposer isdisclosed in the aforementioned co-pending application entitled “Z-AxisCompressible Polymer With Fine Metal Matrix Suspension,” Ser. No.09/315,373 filed on even date herewith and assigned to the assignee ofthe present invention, although other interposers may also becontemplated.

Preferably, interposer 100 comprises polyimide or some other suitableflexible material and has through-studs 150 which correspond to studs40A and vias 60 for interconnecting chip carrier 15 to chip 12. Mostpreferably, through-studs 150 on interposer 100 have palladium dendrites155 plated or both exposed surfaces. The dendrites 155 make contact withthe matching array of studs 40A and vias 60. The protrusion of studs 40Aassures that contact is first made between the matching array of studs40A when pressure is applied to interposer 100. This allows for smallvariations in the interposer thickness and tolerances in the planarityachieved in the leveled camber of chip carrier 15. Interposer 100, notbeing permanently bonded to chip 12 or chip carrier 15, may be usedduring test and burn-in of the chip 12 since they are easily separable.

Once chip 12 and chip carrier 15 have passed inspection and requirepermanent bonding, interposer 100 may be replaced with an interposermade from a thin epoxy material about 20 μm to about 40 μm thick withthe suitable array of through-studs filled with a conductive materialsuch as gold or silver. The epoxy interposer is then aligned to bothchip 12 and chip carrier 15 and permanently bonded by applying heat andpressure. Vias 60 on chip carrier 15 and the protruding studs 40A onchip 12 assure that good electrical contacts are made. Of course, othermethods of permanently bonding chip 12 and chip carrier 15 may also becontemplated.

The present invention achieves the objects recited above. The presentinvention discloses a novel interconnect methodology using asubstantially lead-free stud that provides an essentially planar surfacefor chip to substrate interconnection. The use of the protruding studsprovides a substantially planar surface for interconnection with a chipcarrier or substrate. Additionally, camber on the surface of thesubstrate may be overcome by coating the substrate with a dielectricfilm and planarizing the dielectric film to provide a substantiallyplanar surface for interconnection.

While the present invention has been particularly described, inconjunction with a specific preferred embodiment, it is evident thatmany alternatives, modifications and variations will be apparent tothose skilled in the art in light of the foregoing description. It istherefore contemplated that the appended claims will embrace any suchalternatives, modifications and variations as falling within the truescope and spirit of the present invention.

Thus, having described the invention, what is claimed is:
 1. A method ofinterconnecting electronic components comprising the steps of: (a)providing a first electronic component having electrical devices withcorresponding bonding pads, said first electronic component having apatterned dielectric film formed thereon, said dielectric film having aplurality of protruding conductive studs, said studs corresponding tothe bonding pads and adapted for electrical connection to the electricaldevices; (b) providing a second electronic component having a dielectricfilm formed thereon, said dielectric film having a plurality ofconductive vias corresponding to the studs on said first electroniccomponent; (c) providing an interposer having electricalinterconnections corresponding to the studs and vias; and (d) aligningsaid first electronic component and said second electronic componentwith said interposer disposed therebetween, such that the studs of saidfirst electronic component and the vias of said second electroniccomponent are adapted to be electrically interconnected by saidinterposer.
 2. The method of claim 1 wherein in step (b) said secondelectronic component is formed by (a) forming a layer of dielectric on asurface of said second electronic component; (b) planarizing said layerof dielectric; (c) forming a plurality of vias corresponding to contactpads on said second electronic component; (d) filling said vias with aconductive material; and (e) planarizing said vias.
 3. The method ofclaim 1 wherein step (c) comprises providing a flexible interposerhaving electrical interconnections comprising conductive metal vias withpalladium dendrites formed on a top exposed surface and a bottom exposedsurface.
 4. The method of claim 1 further including the step of heatingsaid first electronic component and said second electronic componentwith said interposer disposed therebetween such that said interposerprovides mechanical interconnection for said electronic components.
 5. Amethod of interconnecting electronic components comprising the steps of:(a) providing a semiconductor chip having electrical devices withcorresponding bonding pads, said semiconductor chip having a patterneddielectric film formed thereon, said dielectric film having a pluralityof protruding conductive studs, said studs corresponding to the bondingpads and adapted for electrical connection to the electrical devices;(b) providing a substrate having a cambered surface with a planarizeddielectric film formed thereon having a plurality of planar conductivevias of varying depths corresponding to the studs on said semiconductorchip; (c) providing an interposer having electrical interconnectionscorresponding to the studs and vias; and (d) aligning said semiconductorchip and said substrate with said interposer disposed therebetween, suchthat the studs of said semiconductor chip and the vias of said substrateare adapted to be electrically interconnected by said interposer.
 6. Themethod of claim 5 wherein in step (b) said substrate is provided by (a)forming a layer of dielectric on the cambered surface of said substrate;(b) planarizing said layer of dielectric; (c) forming a plurality ofvias corresponding to contact pads on said substrate; (d) filling saidvias with a conductive material; and (e) planarizing said vias.
 7. Amethod of interconnecting electronic components comprising the steps of:(a) providing a semiconductor chip having electrical devices withcorresponding bonding pads, said chip having a patterned and curedpolyimide film formed thereon, said polyimide film having a plurality ofprotruding conductive metal studs, said studs corresponding to thebonding pads and adapted for electrical connection to the electricaldevices with corresponding bonding pads, said semiconductor chip havinga patterned dielectric film formed thereon, said dielectric film havinga plurality of protruding conductive studs, said studs corresponding tothe bonding pads and adapted for electrical connection to the electricaldevices; (b) providing a second electronic component having a dielectricfilm formed thereon, said dielectric film having a plurality ofconductive vias corresponding to the studs on said semiconductor chip;(c) providing an interposer having electrical interconnectionscorresponding to the studs and vias; and (d) aligning said semiconductorchip and said second electronic component with said interposer disposedtherebetween, such that the studs of said first electronic component andthe vias of said second electronic component are adapted to beelectrically interconnected by said interposer.
 8. A method ofinterconnecting electronic components comprising the steps of: (a)providing a first electronic component having electrical devices withcorresponding bonding pads, said first electronic component having apatterned dielectric film formed thereon, said dielectric film having aplurality of protruding conductive studs, said studs protruding about 15μm to 20 μm from a surface of said dielectric film and having a diameterof about 50 μm to about 75 μm, said studs corresponding to the bondingpads and adapted for electrical connection to the electrical devices;(b) providing a second electronic component having a dielectric filmformed thereon, said dielectric film having a plurality of conductivevias corresponding to the studs on said first electronic component; (c)providing an interposer having electrical interconnections correspondingto the studs and vias; and (d) aligning said first electronic componentand said second electronic component with said interposer disposedtherebetween, such that the studs of said first electronic component andthe vias of said second electronic component are adapted to beelectrically interconnected by said interposer.
 9. A method ofinterconnecting electronic components comprising the steps of: (a)providing a first electronic component having electrical devices withcorresponding bonding pads, said first electronic component having apatterned dielectric film formed thereon, said dielectric film having aplurality of protruding conductive studs which comprise copper, saidstuds corresponding to the bonding pads and adapted for electricalconnection to the electrical devices; (b) providing a second electroniccomponent having a dielectric film formed thereon, said dielectric filmhaving a plurality of conductive vias corresponding to the studs on saidfirst electronic component; (c) providing an interposer havingelectrical interconnections corresponding to the studs and vias; and (d)aligning said first electronic component and said second electroniccomponent with said interposer disposed therebetween, such that thestuds of said first electronic component and the vias of said secondelectronic component are adapted to be electrically interconnected bysaid interposer.
 10. A method of interconnecting electronic componentscomprising the steps of: (a) providing a first electronic componenthaving electrical devices with corresponding bonding pads, said firstelectronic component having a patterned dielectric film formed thereon,said dielectric film having a plurality of protruding conductive studs,said studs corresponding to the bonding pads and adapted for electricalconnection to the electrical devices; (b) providing a second electroniccomponent having a substrate having a cured polyimide film formedthereon, said polyimide film having a plurality of copper viassubstantially planar to a surface of said film and capped with gold,said vias corresponding to the studs on said first electronic component;(c) providing an interposer having electrical interconnectionscorresponding to the studs and vias; and (d) aligning said firstelectronic component and said second electronic component with saidinterposer disposed therebetween, such that the studs of said firstelectronic component and the vias of said second electronic componentare adapted to be electrically interconnected by said interposer.
 11. Amethod of interconnecting electronic components comprising the steps of:(a) providing a first electronic component having electrical deviceswith corresponding bonding pads, said first electronic component havinga patterned dielectric film formed thereon, said dielectric film havinga plurality of protruding conductive studs, said studs corresponding tothe bonding pads and adapted for electrical connection to the electricaldevices; (b) providing a second electronic component having a dielectricfilm formed thereon, said dielectric film having a plurality ofconductive vias corresponding to the studs on said first electroniccomponent, and said vias have a depth of at least 15 to about 30 μm; (c)providing an interposer having electrical interconnections correspondingto the studs and vias; and (d) aligning said first electronic componentand said second electronic component with said interposer disposedtherebetween, such that the studs of said first electronic component andthe vias of said second electronic component are adapted to beelectrically interconnected by said interposer.
 12. The method of claim10 wherein in step (b) said plurality of copper vias protrude about 10to about 15 μm from a surface of said planarized dielectric film.
 13. Amethod of interconnecting electronic components comprising the steps of:(a) providing a first electronic component having electrical deviceswith corresponding bonding pads, said first electronic component havinga patterned dielectric film formed thereon, said dielectric film havinga plurality of protruding conductive studs, said studs corresponding tothe bonding pads and adapted for electrical connection to the electricaldevices; (b) providing a second electronic component having a substratehaving a cambered surface with a planarized dielectric film formedthereon, said dielectric film having a plurality of planar conductivevias of varying depth corresponding to the studs on said firstelectronic component; (c) providing an interposer having electricalinterconnections corresponding to the studs and vias; and (d) aligningsaid first electronic component and said second electronic componentwith said interposer disposed therebetween, such that the studs of saidfirst electronic component and the vias of said second electroniccomponent are adapted to be electrically interconnected by saidinterposer.
 14. A method of interconnecting electronic componentscomprising the steps of: (a) providing a semiconductor chip havingelectrical devices with corresponding bonding pads, said semiconductorchip having a patterned dielectric film formed thereon, said dielectricfilm having a plurality of protruding conductive studs which comprisecopper, said studs corresponding to the bonding pads and adapted forelectrical connection to the electrical devices; (b) providing asubstrate having a cambered surface with a planarized dielectric filmformed thereon having a plurality of planar conductive vias of varyingdepths corresponding to the studs on said semiconductor chip; (c)providing an interposer having electrical interconnections correspondingto the studs and vias; and (d) aligning said semiconductor chip and saidsubstrate with said interposer disposed therebetween, such that thestuds of said semiconductor chip and the vias of said substrate areadapted to be electrically interconnected by said interposer.